Compound semiconductor device and manufacturing method of the same

ABSTRACT

An embodiment of a compound semiconductor device includes: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the compound semiconductor stacked structure. A recess positioning between the gate electrode and the drain electrode in a plan view is formed at a surface of the compound semiconductor stacked structure.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Divisional application of U.S. application Ser. No. 13/664,745, filed on Oct. 31, 2012, which is based upon and claims the benefit of priority of the prior Japanese Patent Application No. 2011-268237, filed on Dec. 7, 2011, the entire contents of which are incorporated herein by reference.

FIELD

The embodiments discussed herein are directed to a compound semiconductor device, a manufacturing method thereof and so on.

BACKGROUND

In a high power and high frequency device using a compound semiconductor device, in particular, a high electron mobility transistor (HEMT) containing nitride such as GaN, an increase of on-resistance caused by a current collapse is acknowledged as a problem. The current collapse occurs caused by an electric field concentration in a vicinity of a drain side edge of a gate electrode and so on. Accordingly, a structure in which a conductive film called as a field plate is connected to a source electrode has been studied to reduce the increase of the on-resistance caused by the current collapse and further, to reduce a lowering of an output current. The field plate is sometimes called as a source wall. In this structure, the field plate passes at upward of the gate electrode from the source electrode, and extents to an upward of an arbitrary position between the gate electrode and the drain electrode, and a ground potential is applied to the source electrode and the field plate. According to the structure, the electric field concentration between the gate electrode and the drain electrode is controlled, and the electric field intensity at the drain side edge of the gate electrode is lowered. The current collapse is thereby suppressed. In particular, it is effective for a high frequency and high power device used for a communication and so on.

However, the current collapse is reduced but on the other hand, a gain is also lowered in a conventional HEMT using a field plate.

-   [Patent Literature 1] Japanese Laid-open Patent Publication No.     2001-60684

SUMMARY

According to an aspect of the embodiments, a compound semiconductor device includes: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the compound semiconductor stacked structure. A recess positioning between the gate electrode and the drain electrode in a plan view is formed at a surface of the compound semiconductor stacked structure.

According to another aspect of the embodiments, a method of manufacturing a compound semiconductor device includes: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the compound semiconductor stacked structure; and forming a recess positioning between the gate electrode and the drain electrode in a plan view at a surface of the compound semiconductor stacked structure.

The object and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the claims. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a sectional view illustrating a structure of a referential example;

FIG. 2A is a sectional view illustrating a structure of a compound semiconductor device according to a first embodiment;

FIG. 2B is a view illustrating a layout of the compound semiconductor device according to the first embodiment;

FIG. 3A to FIG. 3M are sectional views illustrating a method of manufacturing the compound semiconductor device according to the first embodiment in process sequence;

FIG. 4 is a sectional view illustrating a structure of a compound semiconductor device according to a second embodiment;

FIG. 5A to FIG. 5D are sectional views illustrating a method of manufacturing the compound semiconductor device according to the second embodiment in process sequence;

FIG. 6 is a sectional view illustrating a structure of a compound semiconductor device according to a third embodiment;

FIG. 7 is a sectional view illustrating a structure of a compound semiconductor device according to a fourth embodiment;

FIG. 8A to FIG. 8K are sectional views illustrating a method of manufacturing the compound semiconductor device according to the fourth embodiment in process sequence;

FIG. 9 is a sectional view illustrating a structure of a compound semiconductor device according to a fifth embodiment;

FIG. 10 is a sectional view illustrating a structure of a compound semiconductor device according to a sixth embodiment;

FIG. 11 is a sectional view illustrating a structure obtained when an MIS structure is applied to the fifth embodiment;

FIG. 12 is a sectional view illustrating a structure obtained when an MIS structure and a gate recess are applied to the second embodiment;

FIG. 13 is a drawing illustrating a discrete package according to a seventh embodiment;

FIG. 14 is a wiring diagram illustrating a power factor correction (PFC) circuit according to an eighth embodiment;

FIG. 15 is a wiring diagram illustrating a power supply apparatus according to a ninth embodiment; and

FIG. 16 is a wiring diagram illustrating a high-frequency amplifier according to a tenth embodiment.

FIG. 17A to FIG. 17C are views illustrating results of a first experiment; and

FIG. 18A to FIG. 18C are views illustrating results of a second experiment.

DESCRIPTION OF EMBODIMENTS

The present inventor studied as for causes in which a gain is lowered in a conventional HEMT. As a result, the inventor found that a parasitic capacitance C_(gs) between a field plate 116 and a gate electrode 113 and a parasitic capacitance C_(ds) between the field plate 116 and a drain electrode 114 d increase according to an existence of the field plate 116 connected to a source electrode 114 s as a referential example illustrated in FIG. 1, and this incurs the lowering of the gain.

Note that in the referential example, a buffer layer 112 a, an electron transit layer 112 b, an electron supply layer 112 c and a surface layer 112 d are formed on a substrate 111. Two-dimensional electron gas (2DEG) exists in the vicinity of the boundary with the electron supply layer 112 c in the electron transit layer 112 b. An element isolation region 118 defining an active region is formed in the buffer layer 112 a, the electron transit layer 112 b, the electron supply layer 112 c and the surface layer 112 d. Recesses 131 s and 131 d exposing the electron supply layer 112 c are formed in the surface layer 112 d, the source electrode 114 s is formed in the recess 131 s, and the drain electrode 114 d is formed in the recess 131 d. Further, an insulating film 119 covering the surface layer 112 d, the source electrode 114 s and the drain electrode 114 d is formed. An opening 133 is formed at an approximately intermediate position between the source electrode 114 s and the drain electrode 114 d in the insulating film 119. The gate electrode 113 which is in contact with the surface layer 112 d via the opening 133 is formed on the insulating film 119. Besides, an insulating film 115 covering the gate electrode 113 is formed on the insulating film 119. The field plate 116 is connected to the source electrode 114 s, and formed on the insulating film 115.

The present inventor studied hard based on the above-stated knowledge, and came to constitutions of embodiments described below.

First Embodiment

First, a first embodiment is described. FIG. 2A is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the first embodiment.

In the first embodiment, for example, a buffer layer 12 a, an electron transit layer 12 b, an electron supply layer 12 c and a surface layer 12 d are formed on or above a substrate 11 of a semi-insulating SiC substrate and so on, as illustrated in FIG. 2A. The buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c and the surface layer 12 d are included in a nitride compound semiconductor stacked structure 12. The buffer layer 12 a and the electron transit layer 12 b are GaN layers (i-GaN layers) in which, for example, impurities are not doped, and a total thickness thereof is approximately 3 μm. The buffer layer 12 a prevents propagation of a lattice defect existing at a surface of the substrate 11 to the electron transit layer 12 b. The electron supply layer 12 c is, for example, an n-type AlGaN layer (n-AlGaN layer), and a thickness thereof is approximately 10 nm. The surface layer 12 d is, for example, an n-type GaN layer (n-GaN layer), and a thickness thereof is 10 nm or less. Two-dimensional electron gas (2DEG) exists in the vicinity of the boundary with the electron supply layer 12 c in the electron transit layer 12 b.

Besides, an element isolation region 18 defining an active region is formed in the buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c and the surface layer 12 d. Recesses 31 s and 31 d exposing the electron supply layer 12 c are formed in the surface layer 12 d, a source electrode 14 s is formed in the recess 31 s, and a drain electrode 14 d is formed in the recess 31 d. Further, an insulating film 19 covering the surface layer 12 d, the source electrode 14 s and the drain electrode 14 d is formed. A silicon nitride film is formed as the insulating film 19, for example, and a thickness thereof is approximately 50 nm, for example. An opening 33 is formed at an approximately intermediate position between the source electrode 14 s and the drain electrode 14 d in the insulating film 19. A gate electrode 13 which is in contact with the surface layer 12 d via the opening 33 is formed on the insulating film 19. Besides, an insulating film 15 covering the gate electrode 13 is formed on the insulating film 19. Note that the gate electrode 13 does not necessarily position at a center between the source electrode 14 s and the drain electrode 14 d.

In the present embodiment, a recess 32 getting across between the drain electrode 14 d and the gate electrode 13 in a plan view is formed at a surface of the surface layer 12 d. The insulating film 19 is formed to get into the recess 32.

In the GaN-based HEMT constituted as stated above, the recess 32 is formed at the surface of the surface layer 12 d, and therefore, not only a depletion layer 41 spreads in a vicinity of the gate electrode 13 but also a depletion layer 42 spreads in a vicinity of the recess 32, as illustrated in FIG. 2A. Accordingly, an electric field concentration region is formed between the gate electrode 13 and the drain electrode 14 d in a plan view. As a result, potential drops occur not only in the vicinity of the gate electrode 13 but also in the vicinity of the recess 32, and an electric field intensity in the vicinity of the gate electrode 13 is lowered. Accordingly, expansion of the depletion layer 41 resulting from electron capture in the vicinity of the gate electrode 13 is reduced, and the current collapse is suppressed. As stated above, according to the present embodiment, it is possible to suppress the current collapse, even though a field plate is not provided. The field plate does not exist, and therefore, increases of the parasitic capacitance C_(gs) and the parasitic capacitance C_(ds) are avoided, and high gain can be obtained.

A layout when it is seen from a surface side of the substrate 11 is, for example, as illustrated in FIG. 2B. Namely, planer shapes of the gate electrode 13, the source electrode 14 s and the drain electrode 14 d are comb-teeth shapes, and the source electrodes 14 s and the drain electrodes 14 d are alternately disposed. Besides, the recess 32 is formed to extend in a direction parallel to the gate electrode 13 and the drain electrode 14 d between the gate electrode 13 and the drain electrode 14 d in a plan view, and a region between the gate electrode 13 and the drain electrode 14 d is divided into two by the recess 32 in the element region defined by the element isolation region 18. Plural gate electrodes 13 are commonly connected with each other, plural source electrodes 14 s are commonly connected with each other, and plural drain electrodes 14 d are commonly connected with each other. It is possible to improve an output by applying a multi-finger gate structure as stated above.

Next, a method of manufacturing the GaN-based HEMT according to the first embodiment is described. FIG. 3A to FIG. 3M are sectional views illustrating the method of manufacturing the GaN-based HEMT according to the first embodiment in process sequence.

First, the buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c and the surface layer 12 d are epitaxially grown on or above the substrate 11 such as, for example, a semi-insulating SiC substrate by a metal organic chemical vapor deposition (MOCVD) method, for example, as illustrated in FIG. 3A. The buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c and the surface layer 12 d are included in the compound semiconductor stacked structure 12.

Next, Ar is selectively injected to the compound semiconductor stacked structure 12, and thereby, the element isolation region 18 defining the active region is formed in the compound semiconductor stacked structure 12 and in a surface layer part of the substrate 11, as illustrated in FIG. 3B.

Then, a resist pattern 21 having openings 21 a at a region where the source electrode is to be formed and at a region where the drain electrode is to be formed is formed on the compound semiconductor stacked structure 12, as illustrated in FIG. 3C.

Subsequently, a dry etching of the surface layer 12 d is performed using inert gas and chlorine gas such as Cl₂ gas with the resist pattern 21 as a mask to thereby form the recesses 31 s and 31 d in the surface layer 12 d, as illustrated in FIG. 3D. Note that a part of the surface layer 12 d may be remained or a part of the electron supply layer 12 c may be removed as for depths of the recesses 31 s and 31 d. Namely, the depths of the recesses 31 s and 31 d do not necessary match with a thickness of the surface layer 12 d.

Next, the source electrode 14 s is formed in the recess 31 s, and the drain electrode 14 d is formed in the recess 31 d, as illustrated in FIG. 3E. When the source electrode 14 s and the drain electrode 14 d are formed, for example, first, a Ti layer is formed by a vapor deposition method, and an Al layer is formed thereon by a vapor deposition method. A thickness of the Ti layer is approximately 20 nm, and a thickness of the Al layer is approximately 200 nm. The resist pattern 21 used for the formation of the recesses 31 s and 31 d is removed together with the Ti layer and the Al layer formed thereon. Namely, the vapor deposition and a lift-off technology are used for the formation of the source electrode 14 s and the drain electrode 14 d, for example. Then, a heat treatment at approximately 550° C. is performed, and thereby, the source electrode 14 s and the drain electrode 14 d come in ohmic contact with the surface of the compound semiconductor stacked structure 12 (a surface of the electron supply layer 12 c). Note that a resist pattern used for the lift-off may be different from the resist pattern 21 used for the formation of the recesses 31 s and 31 d. For example, a resist with an eaves structure may be used.

Subsequently, a resist pattern 22 having an opening 22 a at a region where the recess 32 is to be formed is formed on the compound semiconductor stacked structure 12, the source electrode 14 s and the drain electrode 14 d, as illustrated in FIG. 3F. For example, PFI-32 manufactured by Sumitomo Chemical Co., Ltd. is used as a material of the resist pattern 22. Besides, an ultraviolet exposure is performed for the exposure when the opening 22 a is formed, and for example, NMD-W manufactured by Tokyo Ohka Kogyo Co., Ltd. is used as a developing solution.

Next, a dry-etching is performed with the resist pattern 22 as a mask to thereby form the recess 32 at the surface of the surface layer 12 d, as illustrated in FIG. 3G. For example, Cl₂ gas is used in this dry-etching. A width of the recess 32 is, for example, approximately 500 nm. The resist pattern 22 is removed after the formation of the recess 32.

Then, the insulating film 19 covering the source electrode 14 s and the drain electrode 14 d is formed at a whole surface of the compound semiconductor stacked structure 12, as illustrated in FIG. 3H. A silicon nitride (SiN) film is formed by a plasma CVD method as the insulating film. 19, for example.

Next, a resist pattern 23 having an opening 23 a at a region where an opening for the gate electrode is to be formed is formed on the insulating film 19, as illustrated in FIG. 3I. For example, PFI-32 manufactured by Sumitomo Chemical Co., Ltd. is used as a material of the resist pattern 23. Besides, an ultraviolet exposure is performed for the exposure when the opening 23 a is formed, and for example, NMD-W manufactured by Tokyo Ohka Kogyo Co., Ltd. is used as a developing solution. A dry-etching is performed with the resist pattern 23 as a mask to thereby form the opening 33 in the insulating film 19. For example, SF₆ gas is used in this dry-etching. A width of the opening 33 is, for example, approximately 600 nm. The resist pattern 23 is removed after the formation of the opening 33.

Subsequently, a resist pattern 24 having an opening 24 a for the gate electrode and a resist pattern 25 having an opening 25 a which is narrower than the opening 24 a are formed on the insulating film 19, as illustrated in FIG. 3J. For example, polymethylglutarimide (PMGI) (for example, manufactured by Micro-Chem Inc. in the United States) is used as a material of the resist pattern 24, and for example, PFI-32 manufactured by Sumitomo Chemical Co., Ltd. is used as a material of the resist pattern 25. Besides, an ultraviolet exposure is performed for the exposure when the openings 24 a and 25 a are formed, and for example, NMD-W manufactured by Tokyo Ohka Kogyo Co., Ltd. is used as a developing solution. A width of the opening 25 a is, for example, approximately 1.5 μm. A multilayer resist in an eaves structure is obtained by the processes as stated above.

Next, the gate electrode 13 which is in contact with the surface layer 12 d via the opening 33 is formed on the insulating film 19, as illustrated in FIG. 3K. For example, a Ni layer is formed by a vapor deposition method, and an Au layer is formed thereon by a vapor deposition method when the gate electrode 13 is formed. A thickness of the Ni layer is approximately 10 nm, and a thickness of the Au layer is approximately 300 nm.

Then, the resist patterns 24 and 25 are removed together with the Ni layer and the Au layer formed thereon with a heated organic solvent, as illustrated in FIG. 3L. Namely, for example, the vapor deposition and lift-off technologies are used also for the formation of the gate electrode 13.

Subsequently, the insulating film 15 covering the gate electrode 13 is formed on the insulating film 19, as illustrated in FIG. 3M. A silicon nitride (SiN) film is formed by a plasma CVD method, for example, as the insulating film 15.

A protective film, wirings, and so on are formed according to need, to thereby complete the GaN-based HEMT (semiconductor device).

Note that a depth of the recess 32 is not particularly limited, but it is preferable that the surface layer 12 d remains at a bottom of the recess 32. When the surface layer 12 d does not remain at the bottom of the recess 32, namely, when the recess 32 reaches up to the electron supply layer 12 c, there is a possibility in which alteration and so on of the surface of the electron supply layer 12 c occurs, and there is a case when a trap level of an electric charge occurs if the alteration occurs. It is possible to suppress the occurrence of the trap level and to further improve the current collapse when the surface layer 12 d remains at the bottom of the recess 32.

Second Embodiment

Next, a second embodiment is described. FIG. 4 is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the second embodiment.

In the second embodiment, two recesses 32 a and 32 b of which depths are different from one another are formed at the surface layer 12 d, as illustrated in FIG. 4. Note that the recesses 32 a and 32 b are formed to extend in a direction parallel to the gate electrode 13 and the drain electrode 14 d between the gate electrode 13 and the drain electrode 14 d in a plan view as same as the recess 32. The recesses 32 a and 32 b continue with one another in a direction connecting the gate electrode 13 and the drain electrode 14 d. The recess 32 a positioning at the drain electrode 14 d side is deeper than the recess 32 b positioning at the gate electrode 13 side. A combination of the recesses 32 a and 32 b may be considered to be one recess having steps of which depths are different from one another in the direction connecting the gate electrode 13 and the drain electrode 14 d. The other constitutions are the same as the first embodiment.

According to the second embodiment as stated above, a gradient of the depletion layer 42 is moderate compared to the first embodiment, as illustrated in FIG. 4. Accordingly, a gradient of the electric field moderately changes compared to the first embodiment. When the gradient of the electric field is relatively steep, there is a case when the electrons are captured by traps existing at the surface and so on of the compound semiconductor stacked structure 12 at a periphery thereof, and it causes an increase of the on-resistance. On the other hand, according to the second embodiment, it is possible to suppress the capture of the electrons as stated above and the increase of the on-resistance.

Next, a method of manufacturing the GaN-based HEMT according to the second embodiment is described. FIG. 5A to FIG. 5D are sectional views illustrating the method of manufacturing the GaN-based HEMT according to the second embodiment in process sequence.

First, the processes up to the formation of the source electrode 14 s and the drain electrode 14 d are performed as same as the first embodiment (FIG. 3E). Subsequently, a resist pattern 26 having an opening 26 a at a region where the recesses 32 a and 32 b are to be formed is formed on the compound semiconductor stacked structure 12, the source electrode 14 s and the drain electrode 14 d, as illustrated in FIG. 5A. For example, PFI-32 manufactured by Sumitomo Chemical Co., Ltd. is used as a material of the resist pattern 26. Besides, an ultraviolet exposure is performed for the exposure when the opening 26 a is formed, and, for example, NMD-W manufactured by Tokyo Ohka Kogyo Co., Ltd. is used as a developing solution.

Then, a dry-etching is performed with the resist pattern 26 as a mask to thereby form a recess 32 b′ at the surface of the surface layer 12 d, as illustrated in FIG. 5B. For example, Cl₂ gas is used in this dry-etching. A width of the recess 32 b′ is, for example, approximately 1000 nm. The resist pattern 26 is removed after the recess 32 b′ is formed.

Subsequently, a resist pattern 27 having an opening 27 a at a region where the recess 32 a is to be formed is formed on the compound semiconductor stacked structure 12, the source electrode 14 s and the drain electrode 14 d, as illustrated in FIG. 5C. For example, PFI-32 manufactured by Sumitomo Chemical Co., Ltd. is used as a material of the resist pattern 27. Besides, an ultraviolet exposure is performed for the exposure when the opening 27 a is formed, and for example, NMD-W manufactured by Tokyo Ohka Kogyo Co., Ltd. is used as a developing solution.

Next, a dry-etching is performed with the resist pattern 27 as a mask to thereby make the recess 32 b′ deeper and form the recess 32 a, as illustrated in FIG. 5D. For example, Cl₂ gas is used in this dry-etching. A width of the recess 32 a is, for example, approximately 500 nm. The resist pattern 27 is removed after the recess 32 a is formed. A remainder of the recess 32 b′ is the recess 32 b.

Then, the processes after the formation of the insulating film 19 are performed as same as the first embodiment. The GaN-based HEMT (semiconductor device) is thereby completed.

As stated above, the recesses 32 a and 32 b are formed by performing the formation of the resist mask and the dry-etching twice and so on, instead of the formation of the recess 32, for example, to manufacture the compound semiconductor device according to the second embodiment.

Note that depths of the recesses 32 a and 32 b are not particularly limited, but it is preferable that the surface layer 12 d remains at a bottom of the recess 32 a, which is deeper than the recess 32 b. When the surface layer 12 d does not remain at the bottom of the recess 32 a, namely, when the recess 32 a reaches up to the electron supply layer 12 c, there is a possibility in which alteration and so on of the surface of the electron supply layer 12 c occurs, and there is a case when a trap level of an electric charge occurs if the alteration occurs. It is possible to suppress the occurrence of the trap level and to further improve the current collapse when the surface layer 12 d remains at the bottom of the recess 32 a.

Third Embodiment

Next, a third embodiment is described. FIG. 6 is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the third embodiment.

In the third embodiment, two recesses 32 c and 32 d are formed at the surface layer 12 d, as illustrated in FIG. 6. Note that the recesses 32 c and 32 d are formed to extend in a direction parallel to the gate electrode 13 and the drain electrode 14 d between the gate electrode 13 and the drain electrode 14 d in a plan view as same as the recess 32. The recesses 32 c and 32 d are apart from one another in a direction connecting the gate electrode 13 and the drain electrode 14 d. A combination of the recesses 32 c and 32 d may be considered to be one recess including plural pieces separated into in the direction connecting the gate electrode 13 and the drain electrode 14 d. The other constitutions are the same as the first embodiment.

According to the third embodiment as stated above, a gradient of the depletion layer 42 is moderate compared to the first embodiment, as illustrated in FIG. 6. Accordingly, it is possible to suppress the capture of the electrons and the increase of the on-resistance according thereto as same as the second embodiment.

Note that, for example, the recesses 32 c and 32 d may be formed instead of the recess 32 to manufacture the compound semiconductor device according to the third embodiment. Depths of the recesses 32 c and 32 d may be the same as one another or may be different from one another. When the depths of the recesses 32 c and 32 d are the same as one another, the number of times of the formation of the resist mask, the dry-etching, and so on may be once as same as the case when the recess 32 is formed.

Fourth Embodiment

Next, a fourth embodiment is described. FIG. 7 is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the fourth embodiment.

In the fourth embodiment, a lower layer 12 d 1, an intermediate layer 12 d 2 and an upper layer 12 d 3 are included in the surface layer 12 d, as illustrated in FIG. 7. The lower layer 12 d 1 is, for example, a GaN layer (i-GaN layer) to which impurities are not doped. The intermediate layer 12 d 2 is, for example, an AlGaN layer (i-AlGaN layer) to which impurities are not doped. The upper layer 12 d 3 is, for example, a GaN layer (i-GaN layer) to which impurities are not doped.

The two recesses 32 a and 32 b of which depths are different from one another are formed at the surface layer 12 d as same as the second embodiment. The depth of the recess 32 a is, for example, larger than a total thickness of the upper layer 12 d 3 and the intermediate layer 12 d 2, and smaller than a total thickness of the upper layer 12 d 3, the intermediate layer 12 d 2 and the lower layer 12 d 1. Besides, the depth of the recess 32 b is, for example, substantially equal to the total thickness of the upper layer 12 d 3 and the intermediate layer 12 d 2.

Besides, a gate recess 34 is formed in the upper layer 12 d 3 and the intermediate layer 12 d 2, and the gate electrode 13 is in contact with the lower layer 12 d 1 via the gate recess 34. The other constitutions are the same as the first embodiment.

In the GaN-based HEMT constituted as stated above, a difference of sheet resistances between at downward of the recesses 32 a and 32 b and at a periphery thereof is large compared to the second embodiment by an influence of the lower layer 12 d 1, the intermediate layer 12 d 2 and the upper layer 12 d 3, which are included in the surface layer 12 d. Accordingly, the voltage drop caused by the depletion layer 42 is further easy to occur. Therefore, according to the fourth embodiment, it is possible to further suppress the current collapse by effectively concentrating the electric field at downward of the recesses 32 a and 32 b.

Note that the surface layer 12 d of the fourth embodiment may be applied to the first embodiment and the third embodiment.

Next, a method of manufacturing the GaN-based HEMT according to the fourth embodiment is described. FIG. 8A to FIG. 8K are sectional views illustrating the method of manufacturing the GaN-based HEMT according to the fourth embodiment in process sequence.

First, the buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c, the lower layer 12 d 1, the intermediate layer 12 d 2 and the upper layer 12 d 3 are, for example, epitaxially grown by an MOCVD method on or above the substrate 11 such as, for example, a semi-insulating SiC substrate, as illustrated in FIG. 8A. The lower layer 12 d 1, the intermediate layer 12 d 2 and the upper layer 12 d 3 are included in the surface layer 12 d, and the buffer layer 12 a, the electron transit layer 12 b, the electron supply layer 12 c and the surface layer 12 d are included in the compound semiconductor stacked structure 12.

Next, Ar is selectively injected to the compound semiconductor stacked structure 12, and thereby, the element isolation region 18 defining the active region is formed in the compound semiconductor stacked structure 12 and in a surface layer part of the substrate 11, as illustrated in FIG. 8B.

Then, the source electrode 14 s and the drain electrode 14 d are formed as same as the first embodiment, as illustrated in FIG. 8C.

Subsequently, the resist pattern 26 having the opening 26 a at a region where the recesses 32 a and 32 b are to be formed is formed on the compound semiconductor stacked structure 12, the source electrode 14 s and the drain electrode 14 d, as illustrated in FIG. 8D.

Next, a dry-etching of the upper layer 12 d 3 and the intermediate layer 12 d 2 is performed with the resist pattern 26 as a mask to thereby form the recess 32 b′ at the surface of the surface layer 12 d, as illustrated in FIG. 8E. A width of the recess 32 b′ is, for example, approximately 1000 nm. The resist pattern 26 is removed after the formation of the recess 32 b′.

Then, the resist pattern 27 having the opening 27 a at a region where the recess 32 a is to be formed is formed on the compound semiconductor stacked structure 12, the source electrode 14 s and the drain electrode 14 d, as illustrated in FIG. 8F.

Subsequently, a dry-etching of the lower layer 12 d 1 is performed with the resist pattern 27 as a mask to thereby make the recess 32 b′ deeper and form the recess 32 a, as illustrated in FIG. 8G. A width of the recess 32 a is, for example, approximately 500 nm. The resist pattern 27 is removed after the formation of the recess 32 a. A remainder of the recess 32 b′ is the recess 32 b.

Next, the insulating film 19 covering the source electrode 14 s and the drain electrode 14 d is formed at a whole surface of the compound semiconductor stacked structure 12, as illustrated in FIG. 8H.

Then, the resist pattern 23 having the opening 23 a at a region where the opening for the gate electrode is to be formed is formed on the insulating film 19, as illustrated in FIG. 8I. A dry-etching is performed with the resist pattern 23 as a mask to thereby form the opening 33 in the insulating film 19. A width of the opening 33 is, for example, approximately 600 nm.

Subsequently, a dry-etching is performed with the resist pattern 23 as a mask to thereby form the gate recess 34 in the upper layer 12 d 3 and the intermediate layer 12 d 2, as illustrated in FIG. 8J. For example, Cl₂ gas is used in this dry-etching. The resist pattern 23 is removed after the formation of the gate recess 34.

Next, the gate electrode 13 and the insulating film 15 are formed as same as the first embodiment, as illustrated in FIG. 8K.

A protective film, wirings, and so on are formed according to need to thereby complete the GaN-based HEMT (semiconductor device).

Fifth Embodiment

Next, a fifth embodiment is described. FIG. 9 is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the fifth embodiment.

In the fifth embodiment, the gate recess 34 is formed to be deeper than the fourth embodiment, to reach up to a part of the electron supply layer 12 c, as illustrated in FIG. 9. The other constitutions are the same as the fourth embodiment.

In the GaN-based HEMT constituted as stated above, the depletion layer 41 spreads to a region where 2DEG exists in the vicinity of the surface of the electron transit layer 12 b. Accordingly, the GaN-based HEMT can be operated in an enhanced mode.

Note that, for example, an etching time when the gate recess 34 is formed is made longer than the fourth embodiment to manufacture the compound semiconductor device according to the fifth embodiment.

Besides, the gate recess 34 of the fifth embodiment may be applied to the first to third embodiments.

Sixth Embodiment

Next, a sixth embodiment is described. FIG. 10 is a sectional view illustrating a structure of a GaN-based HEMT (compound semiconductor device) according to the sixth embodiment.

A Schottky-junction is formed between the gate electrode 13 and the compound semiconductor stacked structure 12 in the first embodiment. On the other hand, the insulating film 19 lies between the gate electrode 13 and the compound semiconductor stacked structure 12, and the insulating film 19 functions as a gate insulating film in the sixth embodiment. Namely, the opening 33 is not formed in the insulating film 19, and an MIS type structure is employed.

It is also possible to suppress the current collapse while avoiding the increase of the parasitic capacitance according to the sixth embodiment as stated above as same as the first embodiment.

Note that a material of the insulating film 19 is not particularly limited, but for example, an oxide, a nitride or an oxynitride of Si, Al, Hf, Zr, Ti, Ta or W is preferable, and an Al oxide is particularly preferable. Besides, a thickness of the insulating film 19 is 2 nm to 200 nm, for example, approximately 10 nm.

Besides, the MIS type structure as stated above may be applied to the second to fifth embodiments. For example, the formation of the opening 33 is not to be performed to obtain the insulating film 19 included in the MIS type structure as stated above. A structure obtained when the MIS structure is applied to the fifth embodiment is illustrated in FIG. 11, and a structure obtained when the MIS structure and the gate recess are applied to the second embodiment is illustrated in FIG. 12.

Seventh Embodiment

A seventh embodiment relates to a discrete package of a compound semiconductor device which includes a GaN-based HEMT. FIG. 13 is a view illustrating the discrete package according to the seventh embodiment.

In the seventh embodiment, as illustrated in FIG. 13, a back surface of a HEMT chip 210 of the compound semiconductor device according to any one of the first to sixth embodiments is fixed on a land (die pad) 233, using a die attaching agent 234 such as solder. One end of a wire 235 d such as an Al wire is bonded to a drain pad 226 d, to which the drain electrode 14 d is connected, and the other end of the wire 235 d is bonded to a drain lead 232 d integral with the land 233. One end of a wire 235 s such as an Al wire is bonded to a source pad 226 s, to which the source electrode 14 s is connected, and the other end of the wire 235 s is bonded to a source lead 232 s separated from the land 233. One end of a wire 235 g such as an Al wire is bonded to a gate pad 226 g, to which the gate electrode 13 is connected, and the other end of the wire 235 g is bonded to a gate lead 232 g separated from the land 233. The land 233, the HEMT chip 210 and so forth are packaged with a molding resin 231, so as to project outwards a portion of the gate lead 232 g, a portion of the drain lead 232 d, and a portion of the source lead 232 s.

The discrete package may be manufactured by the procedures below, for example. First, the HEMT chip 210 is bonded to the land 233 of a lead frame, using a die attaching agent 234 such as solder. Next, with the wires 235 g, 235 d and 235 s, the gate pad 226 g is connected to the gate lead 232 g of the lead frame, the drain pad 226 d is connected to the drain lead 232 d of the lead frame, and the source pad 226 s is connected to the source lead 232 s of the lead frame, respectively, by wire bonding. Then molding with the molding resin 231 is conducted by a transfer molding process. The lead frame is then cut away.

Eighth Embodiment

Next, an eighth embodiment will be explained. The eighth embodiment relates to a PFC (power factor correction) circuit equipped with a compound semiconductor device which includes a GaN-based HEMT. FIG. 14 is a wiring diagram illustrating the PFC circuit according to the eighth embodiment.

The PFC circuit 250 includes a switching element (transistor) 251, a diode 252, a choke coil 253, capacitors 254 and 255, a diode bridge 256, and an AC power source (AC) 257. The drain electrode of the switching element 251, the anode terminal of the diode 252, and one terminal of the choke coil 253 are connected with each other. The source electrode of the switching element 251, one terminal of the capacitor 254, and one terminal of the capacitor 255 are connected with each other. The other terminal of the capacitor 254 and the other terminal of the choke coil 253 are connected with each other. The other terminal of the capacitor 255 and the cathode terminal of the diode 252 are connected with each other. A gate driver is connected to the gate electrode of the switching element 251. The AC 257 is connected between both terminals of the capacitor 254 via the diode bridge 256. A DC power source (DC) is connected between both terminals of the capacitor 255. In the embodiment, the compound semiconductor device according to any one of the first to sixth embodiments is used as the switching element 251.

In the process of manufacturing the PFC circuit 250, for example, the switching element 251 is connected to the diode 252, the choke coil 253 and so forth with solder, for example.

Ninth Embodiment

Next, a ninth embodiment will be explained. The ninth embodiment relates to a power supply apparatus equipped with a compound semiconductor device which includes a GaN-based HEMT. FIG. 15 is a wiring diagram illustrating the power supply apparatus according to the ninth embodiment.

The power supply apparatus includes a high-voltage, primary-side circuit 261, a low-voltage, secondary-side circuit 262, and a transformer 263 arranged between the primary-side circuit 261 and the secondary-side circuit 262.

The primary-side circuit 261 includes the PFC circuit 250 according to the eighth embodiment, and an inverter circuit, which may be a full-bridge inverter circuit 260, for example, connected between both terminals of the capacitor 255 in the PFC circuit 250. The full-bridge inverter circuit 260 includes a plurality of (four, in the embodiment) switching elements 264 a, 264 b, 264 c and 264 d.

The secondary-side circuit 262 includes a plurality of (three, in the embodiment) switching elements 265 a, 265 b and 265 c.

In the embodiment, the compound semiconductor device according to any one of first to sixth embodiments is used for the switching element 251 of the PFC circuit 250, and for the switching elements 264 a, 264 b, 264 c and 264 d of the full-bridge inverter circuit 260. The PFC circuit 250 and the full-bridge inverter circuit 260 are components of the primary-side circuit 261. On the other hand, a silicon-based general MIS-FET (field effect transistor) is used for the switching elements 265 a, 265 b and 265 c of the secondary-side circuit 262.

Tenth Embodiment

Next, a tenth embodiment will be explained. The tenth embodiment relates to a high-frequency amplifier equipped with a compound semiconductor device which includes a GaN-based HEMT. FIG. 16 is a wiring diagram illustrating the high-frequency amplifier according to the tenth embodiment.

The high-frequency amplifier includes a digital predistortion circuit 271, mixers 272 a and 272 b, and a power amplifier 273.

The digital predistortion circuit 271 compensates non-linear distortion in input signals. The mixer 272 a mixes the input signal having the non-linear distortion already compensated, with an AC signal. The power amplifier 273 includes the compound semiconductor device according to any one of the first to sixth embodiments, and amplifies the input signal mixed with the AC signal. In the illustrated example of the embodiment, the signal on the output side may be mixed, upon switching, with an AC signal by the mixer 272 b, and may be sent back to the digital predistortion circuit 271.

Composition of the compound semiconductor layers used for the compound semiconductor stacked structure is not specifically limited, and GaN, AlN, InN and so forth may be used. Also mixed crystals of them may be used.

Configurations of the gate electrode, the source electrode and the drain electrode are not limited to those in the above-described embodiments. For example, they may be configured by a single layer. The method of forming these electrodes is not limited to the lift-off process. The annealing after the formation of the source electrode and the drain electrode may be omissible, so long as the ohmic characteristic is obtainable. The gate electrode may be annealed.

In the embodiments, the substrate may be a silicon carbide (SiC) substrate, a sapphire substrate, a silicon substrate, a GaN substrate, a GaAs substrate or the like. The substrate may be any of electro-conductive, semi-insulating, and insulating ones. The thickness, the material, and so on of each layer may not be limited to the above-stated embodiments.

Next, experiments performed by the present inventor are described.

(First Experiment)

In a first experiment, three-terminal characteristics of the reference example illustrated in FIG. 1, the first embodiment, and the second embodiment were measured. Results are illustrated in FIG. 17A to FIG. 17C. FIG. 17A illustrates the three-terminal characteristics of the reference example, FIG. 17B illustrates the three-terminal characteristics of the first embodiment, and FIG. 17C illustrates the three-terminal characteristics of the second embodiment. Besides, a horizontal axis of these graphs represents a source-drain voltage Vds, and a vertical axis of these graphs represents a source-drain current Ids.

As illustrated in FIG. 17A to FIG. 17C, the current collapse was drastically suppressed in the first embodiment and the second embodiment compared to the reference example. Besides, it was also verified that the parasitic capacitance C_(gs) and the parasitic capacitance C_(ds) were almost reduced by half from a measurement result of an S parameter.

(Second Experiment)

In a second experiment, a simulation relating to an electron concentration distribution was performed. A result as for a structure in which the single recess 32 was formed (refer to FIG. 2A) corresponding to the first embodiment is illustrated in FIG. 18A. A result as for a structure in which the two recesses 32 a and 32 b of which depths were different from each other were continuously formed (refer to FIG. 4) corresponding to the second embodiment is illustrated in FIG. 18B. A result as for a structure in which the two recesses 32 c and 32 d were formed to be apart from each other (refer to FIG. 6) corresponding to the third embodiment is illustrated in FIG. 18C. Thick lines in FIG. 18A to FIG. 18C represent a depth of a region where an electron concentration from the surface of the compound semiconductor layer was 1×10¹³ cm⁻³, and gradients of the thick lines correlate with the electric field intensity. It has been obvious from the simulation results that the structures corresponding to the second and third embodiments contribute to a reduction of the electric field intensity compared to the structure corresponding to the first embodiment.

According to the above-stated compound semiconductor device and so on, the proper recess is formed at the surface of the compound semiconductor stacked structure, and therefore, it is possible to obtain high gain while suppressing a current collapse.

All examples and conditional language provided herein are intended for pedagogical purposes of aiding the reader in understanding the invention and the concepts contributed by the inventor to further the art, and are not to be construed as limitations to such specifically recited examples and conditions, nor does the organization of such examples in the specification relate to a showing of the superiority and inferiority of the invention. Although one or more embodiments of the present invention have been described in detail, it should be understood that the various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention. 

What is claimed is:
 1. A compound semiconductor device, comprising: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the recess is formed at the nitride surface layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, and a depth of the recess is smaller than a thickness of the nitride surface layer, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 2. A compound semiconductor device, comprising: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, wherein the recess further comprises: a plurality of steps, each respective step of the plurality of steps having a respective depth different from each other, wherein each respective step of the plurality of steps is connected to an adjacent respective step of the plurality of steps in a direction extending from the gate electrode to the drain electrode, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 3. A compound semiconductor device, comprising: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, wherein the recess is formed having a plurality of adjacent regions spaced apart from each other in a direction extending from the gate electrode to the drain electrode, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 4. A compound semiconductor device, comprising: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, further comprising a gate insulating film formed between the gate electrode and the nitride compound semiconductor stacked structure, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 5. A compound semiconductor device, comprising: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, wherein the recess divides a region between the gate electrode and the drain electrode into two portions in a plan view, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 6. A power supply apparatus comprising: a compound semiconductor device, which comprises: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 7. An amplifier comprising: a compound semiconductor device, which comprises: a substrate; a nitride compound semiconductor stacked structure formed on or above the substrate; and a gate electrode, a source electrode and a drain electrode formed on or above the nitride compound semiconductor stacked structure, wherein the nitride compound semiconductor stacked structure comprises: a nitride electron transit layer; a nitride electron supply layer formed on or above the nitride electron transit layer; and a nitride surface layer formed on or above the nitride electron supply layer, wherein the nitride surface layer comprises: a GaN lower layer; an AlGaN intermediate layer formed on the GaN lower layer; and a GaN upper layer formed on the AlGaN intermediate layer, wherein a recess disposed between the gate electrode and the drain electrode in a plan view is formed at a surface of the nitride surface layer, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 8. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, wherein the recess is formed at the nitride surface layer, and wherein the forming the recess comprises etching a part of the nitride surface layer and making another part of the nitride surface layer remained in a depth direction, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 9. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, wherein the recess is formed at the nitride surface layer, and wherein the recess further comprises: a plurality of steps, each respective step of the plurality of steps having a respective depth different from each other, wherein each respective step of the plurality of steps is connected to an adjacent respective step of the plurality of steps in a direction extending from the gate electrode to the drain electrode, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 10. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, wherein the recess is formed at the nitride surface layer, and wherein the recess is formed having a plurality of adjacent regions spaced apart from each other in a direction extending from the gate electrode to the drain electrode, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 11. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, further comprising forming a gate recess at a surface of the nitride compound semiconductor stacked structure, wherein a part of the gate electrode is positioned in the gate recess, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, and wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, and wherein the recess is formed at the nitride surface layer, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 12. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, further comprising forming a gate insulating film disposed between the gate electrode and the nitride compound semiconductor stacked structure, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, and wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, and wherein the recess is formed at the nitride surface layer, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer.
 13. A manufacturing method of a compound semiconductor device, comprising: forming a nitride compound semiconductor stacked structure on or above a substrate; forming a gate electrode, a source electrode and a drain electrode on or above the nitride compound semiconductor stacked structure; and forming a recess disposed between the gate electrode and the drain electrode in a plan view at a surface of the nitride compound semiconductor stacked structure, wherein the forming the nitride compound semiconductor stacked structure comprises: forming a nitride electron transit layer; forming a nitride electron supply layer on or above the nitride electron transit layer; and forming a nitride surface layer on or above the nitride electron supply layer, wherein the forming the nitride surface layer comprises: forming a GaN lower layer; forming an AlGaN intermediate layer on the GaN lower layer; and forming a GaN upper layer on the AlGaN intermediate layer, wherein the recess is formed at the nitride surface layer, and wherein the recess is formed to divide a region between the gate electrode and the drain electrode into two portions in a plan view, and wherein a depletion layer spreads around the recess within the nitride electron supply layer so as not to reach the nitride electron transit layer. 